See Spontaneous direct bonding of thick silicon nitride  by Snaches, Gui, and
Elwenspoek. J. Micromech. Microeng 7 (1997) pp 111-113

>>> lavriknv@ornl.gov 01/09/02 12:07PM >>>
I know that standard bonding processes are
available for materials such as Si, oxide and
pyrex.

Does any one if similar procedures exist for
reliable (without organic adhesives) permanent
bonding of Si and nitride coated wafers.


Any relevant information will be highly
appreciated

Nickolay
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