durusmail: mems-talk: Re: "Swirl" minimization in bulk Si micromachining
Re: "Swirl" minimization in bulk Si micromachining
Re: "Swirl" minimization in bulk Si micromachining
marcus@tesla.njit.edu
1996-07-09
Probably 99.9% of silicon wafers used in MEMS techmnology are made by
the Czochralski method which introduces defects in swirl-like patterns.
Wafers cut from a boule grown by the float-zone method are generally
free of these defects.


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