You may want to contact Virginia Semiconductor Inc for the substrate material. Call (540) 373-2900. Also, they are very interested in the same issue. Stephen Jones >> >> We make microstructures out of 15 mill single crystal silicon substrates. >> Using 110 oriented silicon and masking along the right 111 plane we can etch >> vertically or almost completely anisotropically. A recent application required >> etching 60 mill silicon substrates. The degree of anisotropy we can achieve >> during etching is inconsistent. We can rarely get vertical sidewalls while >> etching. I am told that this is because of "swirl" in the silicon substrates. >> It is my understanding that swirl is a type of "crooked" growth defect during >> LEC crystal growth processing. >> >> >> Can anyone verify that the poor anisotropic etching is due to "swirl"? Is this >> a common problem when performing bulk anisotropic etching of silicon substrates >> that are > 45 mills thick? Does anyone know where I can get single crystal 110 >> silicon substrates (~ 0.060 ") with minimal swirl? Is there another way to get >> excellent wet chemistry anisotropic etching without having to worry about swirl? >> >> Any information I can get would be helpful. >> >> Thank you, >> >> Andrew J. Nielson >> Graduate Student, Mechanical Engineering >> Brigham Young University >> Mems Group >> email: nielsona@et.byu.edu >> http://www.et.byu.edu:80/~nielsona >> >>