We use shadow masks produced by Photo Etch Technologies at 978-805-5004. We've found that using 0.005" thick Invar works well for us. We had originally used Stainless Steel, but the sputtering process heated the shadow mask and caused it to bow away from the substrate. That gave us a blurred pattern. Phil Klauder 215-646-7400 x2151 -----Original Message----- From: Nirmal Govindaraju [mailto:ngovind@unity.ncsu.edu] Sent: Wednesday, February 06, 2002 11:28 AM To: processing@mems-exchange.org; mems-talk@memsnet.org Subject: [mems-talk] Shadow Masks Hi, I'm a Graduate Student at North Carolina State University and I am looking for some information on people who produce shadow masks. Please note that I will be using the shadow masks to fabricate thin film resistors and thermocouples on a substrate using e-beam evaporation. Thank you. Sincerely, Nirmal Govindaraju _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/