durusmail: mems-talk: Is there a way to align two sides of wafer
Is there a way to align two sides of wafer
Is there a way to align two sides of wafer
Frank DiPiazza
2002-02-19
Hi Marty,

The easiest way to accomplish this task using your single side aligner: have a
foundry pattern an alignment mark on both sides of your wafers and send them
back to you.  You are now ready to process each side individually.

-----Original Message-----
From: Martin O. Patton [mailto:patton@er.com]
Sent: Tuesday, February 19, 2002 9:33 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Is there a way to align two sides of wafer


Dear Mems group,

I have a single side mask aligner.  Is there a method by which this aligner
can be used to align features on both sides of the wafer?

Thanks for your assistance.

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Incorporated
6410 Eastland Road
Cleveland, Ohio 44142
www.er.com
(440) 816-9850
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