Hello All,

Right now I'm trying to etch platinum. I checked in the THIN FILM PROCESSES
talking about the echant, it doesn't give a proper material for mask. Can
you please tell me by which mask material should I use in the Pt etching
process?

Thanks a lot,
Hongjun Zeng

Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465