durusmail: mems-talk: Re: Etchant for Cr
Re: Etchant for Cr
1996-07-17
1996-07-17
1996-07-18
Re: Etchant for Cr
Johan Drott
1996-07-17
        Reply to:   RE>Etchant for Cr


>I need to pattern Cr which is deposited on Glass. Does anybody know an =
>etchant for Cr that does not attack photoresist?

Try 1.11547.2500 chrome etch solution LSI from Merck.

/Johan Drott


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