durusmail: mems-talk: Re: Etchant for Cr
Re: Etchant for Cr
1996-07-17
1996-07-17
1996-07-18
Re: Etchant for Cr
Mac McReynolds
1996-07-18
>Hello,
>
> I need to pattern Cr which is deposited on Glass. Does anybody know an etchant
>for Cr that does not attack photoresist?
>
>thanks
>Behrouz Nikpour
>Dept. Elec. Eng.
>Concordia University
>
Transene Company in Rowley, Mass. is a good source for many different
etchants.  They make a decent Cr mask etchant that's compatible with both
positive and negative resist.  (508)948-2501


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