Hi,

Does anyone one know about MEMS force testing devices?
I need to test the actuation force of my actuator. The
force is in the range of 0.1-10 milli-Newtons and the
stroke is about 100um.

In addition, the actuator is a bulk-machined one and
moves laterally IN the wafer plane. It will be
preferrable if the device is small enough to fit under
a microscope.

I would greatly appreciate your help if you can give
me any information about it!

Jian Li
Yahoo! Sports - Coverage of the 2002 Olympic Games
http://sports.yahoo.com