Try contacting Dr. Taher Saif at University of Illinois. He developed a
device that I think can do your job.
http://www.mie.uiuc.edu/content/asp/people/faculty/current/m_taher_a_saif.asp
saif@uiuc.edu

AKT

At 11:34 AM 2/22/2002 -0800, Jian Li wrote:
>Hi,
>
>Does anyone one know about MEMS force testing devices?
>I need to test the actuation force of my actuator. The
>force is in the range of 0.1-10 milli-Newtons and the
>stroke is about 100um.
>
>In addition, the actuator is a bulk-machined one and
>moves laterally IN the wafer plane. It will be
>preferrable if the device is small enough to fit under
>a microscope.
>
>I would greatly appreciate your help if you can give
>me any information about it!
>
>Jian Li
>Yahoo! Sports - Coverage of the 2002 Olympic Games
>http://sports.yahoo.com
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