durusmail: mems-talk: SU-8 spinning problems
SU-8 spinning problems
2002-03-15
2002-03-15
2002-03-15
2002-03-15
wafer level vacuum packaging
2002-03-15
2002-03-15
SU-8 spinning problems
kirt_williams@agilent.com
2002-03-15
> "200 rpm per second" ? Cliff???
>
> 200 rpm means 200 revolutions per minute.  Are you suggesting an
> acceleration or is it just a mistake?

When you program a newer model of spinner,
you can set the acceleration in addition to the rotational speed.
For example, an MTI Flexifab take takes the acceleration in krpm/s.

        --Kirt Williams Agilent Technologies

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