durusmail: mems-talk: SU-8 spinning problems
SU-8 spinning problems
2002-03-15
2002-03-15
2002-03-15
2002-03-15
wafer level vacuum packaging
2002-03-15
2002-03-15
SU-8 spinning problems
CLIF HAMEL
2002-03-15
Yes, 200 rpm per second, not thousands.  A slow acceleration helps the
material spread a little more evenly.

Clif

Clifford J. Hamel
Suss Microtec Applications Engineer
(802) 244-5181, ext 297

>>> kirt_williams@agilent.com 03/15/02 02:32PM >>>
> "200 rpm per second" ? Cliff???
>
> 200 rpm means 200 revolutions per minute.  Are you suggesting an
> acceleration or is it just a mistake?

When you program a newer model of spinner,
you can set the acceleration in addition to the rotational speed.
For example, an MTI Flexifab take takes the acceleration in krpm/s.

        --Kirt Williams Agilent Technologies
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