Though I don't have experience etching fused silica, perhaps the techniques I have used to etch Pyrex would be applicable. Since photoresist doesn't adhere well to Pyrex, I use a chrome layer on the Pyrex as an adhesion layer/etch mask. If an isotropic profile is acceptable, buffered oxide etch (1.7 microns/hr for Pyrex), or HF solution should work. If an anisotropic profile is desired, a fluorine based RIE process, such as SF6/O2 should suffice (5 microns/hr for Pyrex). Roger Shile >>> edward.chan@tufts.edu 05/10/02 12:07PM >>> Hi all, I was wondering if anyone could suggest the "best" way of creating a swimming pool like structure about 20 microns deep in a piece of fused silica. Basically, I need a trench with a known depth for fluid film thickness calibrations. Any ideas or preferred companies for this? Thanks, Edward _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/