You might want to check some of the literature on silicon microstrip radiation detectors. I think they usually use relatively high resistance Si. You might get some fab and supplier info.. -Mike >>> fh1@techprt.co.uk 05/20/02 03:47AM >>> Dear all, I am looking for silicon substrates which can be machined using conventional MEMS type processes, but at the same time are highly insulating. I've found a web page with silicon of 250Kohm-cm resistivity - http://www.tydex.ru/materials/materials2/Si.html. Does anybody: have any experience of working with such materials? know of any issues, for example the stability of the resistivity with temperature? micromachined it without any major issues? know of any suppliers? Thanking you in advance. Regards, Fred. -------------------------------------------- Dr Fred Hussain The Technology Partnership plc Melbourn Science Park Cambridge Road Melbourn Royston Hertfordshire SG8 6EE Tel: 01763 262626 Fax: 01763 261582 www.ttpgroup.com --------------------------------------------- _______________________________________________ mems-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.mems-exchange.org/