durusmail: mems-talk: Re: Photoresist question
Re: Photoresist question
1996-02-22
1996-02-23
Re: Photoresist question
Wen Li
1996-02-22
Hi Chris,
We have had the same problem at JPL. The problem was solved by spraying PR but
the minimum thickness obtainable was about 3.5microns.
wen@icsl.ucla.edu


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