Hi, I wonder if somebody can suggest any etchants that etch PECVD Si-N, but do not etch or etch very slowly alumina coating. Thanks in advance for your help Honggang Jiang Second Sight, LLC 28460 Avenue Stanford, Suite 200 Valencia, California 91355 Ph: 661 775 3990 Fx: 661 775 3989 __________________________________________________ Do you Yahoo!? Y! Web Hosting - Let the expert host your web site http://webhosting.yahoo.com/