durusmail: mems-talk: Etching Si with SiO2 as mask
Etching Si with SiO2 as mask
2002-11-25
2002-11-27
2002-11-27
2002-12-02
2002-11-25
2002-11-25
2002-11-25
2002-11-25
Etching Si with SiO2 as mask
Knighton, Ed
2002-11-25
Hi Patrick,
KOH or EDP works very well for wet etching, How ever should you chose EDP be
very careful the fumes are extremely toxic.

Ed Knighton, Process Engineer
Constellation Technology Corp.

> -----Original Message-----
> From: Patrick Carlberg [SMTP:patrick.carlberg@ftf.lth.se]
> Sent: Monday, November 25, 2002 9:48 AM
> To:   mems-talk@memsnet.org
> Subject:      [mems-talk] Etching Si with SiO2 as mask
>
> Dear all
>
> I am interesseted in etching Si with SiO2 as an etch mask. Does anyone
> know of a dry or wet etch that can be used?
>
> All comments are highly apriciated
>
> Patrick
>
>
>
>
>
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/

reply