Hi Patrick, KOH or EDP works very well for wet etching, How ever should you chose EDP be very careful the fumes are extremely toxic. Ed Knighton, Process Engineer Constellation Technology Corp. > -----Original Message----- > From: Patrick Carlberg [SMTP:patrick.carlberg@ftf.lth.se] > Sent: Monday, November 25, 2002 9:48 AM > To: mems-talk@memsnet.org > Subject: [mems-talk] Etching Si with SiO2 as mask > > Dear all > > I am interesseted in etching Si with SiO2 as an etch mask. Does anyone > know of a dry or wet etch that can be used? > > All comments are highly apriciated > > Patrick > > > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/