durusmail: mems-talk: Au wire deposition
Au wire deposition
2002-12-09
2002-12-10
Au wire deposition
Yanjun(David) Tang
2002-12-09
Hi,folks

I'm depositing thin gold wire (2um) on the surface of SiO2 using LOR 7B lift-off
photoresist. After sputtering a thin layer of gold on the surface of
photoresist, it is supposed to wash away the glod  using acetone and just leave
thin gold wires on the surface of SiO2 layer. The problem is that the wires are
very hard to stay on the surface. Do you have any ideas on how to do this lift-
off process to get clean and intergrate gold wire pattern. I've deposited a
layer of Cr to attach Au layer on wafer surface. Can I do sth else to improve
the attachment. Additionaly, have you ever used gold wire as piezoresistor?

Thanks!

Yanjun(David) Tang
Graduate student
Institute for Micromanufacturing
Louisiana Tech University
1401 Tech Farm Rd. Apt. #238, Ruston, LA 71270, USA
Email: yta001@coes.latech.edu

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