Message-Id:   <199705061621.JAA19071@bimos.csl.sri.com>

>
> Hi,
>
> Is there any one who knows tel. numbers of DRIE(deep reactive ion
> etching) equipment producers?  Please drop me a line if you know. Thank
> you for your help.
>
>
> =====================================================
> Dr. Jin Wenlin
> Visiting Researcher
> DSL, ME Department
> University of California
> Berkeley, CA 94720
> Tel: 510 642-6371 (L)
>      510 525-8116 (H)
> Fax: 510 642-6163
> http: mote.me.berkeley.edu/~wenlin/wenlin.html
> =====================================================
>
>
>
One good place to start is Plasma-Therm.
Give Todd Smith a call at 408-377-3145.


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