durusmail: mems-talk: No subject
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wenlin@mote.ME.berkeley.edu
1997-07-25
Message-Id:   

Dear colleagues:

We have developed a method that can increase sensitivity of a
piezoresistive sensor by an order of magnitude without decreasing its
stiffness/natural-frequency for micro force sensors.  We are considering
 modifying the method and applying it in silicon pressure sensor and
accelerometer designs.  We would like to know if there are demands
for pressure and acceleration sensors with high sensitivity and
good dynamic response.  Or if it is worthwhile to start a project aiming
at increasing the sensitivity of piezoresistive pressure or acceleration
sensors.  Any related information are appreciated.  Thanks.

=====================================================
Dr. Jin Wenlin
Visiting Research Engineer
DSL, ME Department
University of California
Berkeley, CA 94720
Tel: 510 642-6371 (L)
     510 525-8116 (H)
Fax: 510 642-6163
=====================================================


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