durusmail: mems-talk: Polysilicon piezoresistive coefficient
Metal mask for anisotropic etching in EDP, KOH
2002-12-16
Polysilicon piezoresistive coefficient
2002-12-24
Polysilicon piezoresistive coefficient
M. Amien
2002-12-24
Dear all,

What are the factors influencing polysilicon piezoresistive coefficient
? Is there any relation with the poly thickness or doping concentration ?

I wonder that someone could explain that,
I'm very appreciated for any kind of explanation.

Best regard,
mamien
ITB IC processing research lab.


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