durusmail: mems-talk: Uniform Teflon coating on Parylene C
Uniform Teflon coating on Parylene C
2002-12-26
2002-12-31
2003-01-08
Uniform Teflon coating on Parylene C
Richard Chen
2002-12-26
Hi,
Does anyboby know how to spin coat a uniform Teflon coating on Parylene C? I
had tried many times, however, the coating was so nonuniform. If you know
how to make it more uniform and better adhesive to the Parylene C, please
reply. Thanks a lot.


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