durusmail: mems-talk: Uniform Teflon coating on Parylene C
Uniform Teflon coating on Parylene C
2002-12-26
2002-12-31
2003-01-08
Uniform Teflon coating on Parylene C
Mighty Platypus
2003-01-08
Hello Richard,
I've had quite a bit of experience with spinnable teflon. Can you describe
the nonuniformity in some more detail, and tell me which type of teflon AF
you are using, as well as which type of Parylene-C, process details, etc?

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
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On Tue, 31 Dec 2002, Richard Chen wrote:

> Hi,
> Does anyboby know how to spin coat a uniform Teflon coating on Parylene C? I
> had tried many times, however, the coating was so nonuniform. If you know
> how to make it more uniform and better adhesive to the Parylene C, please
> reply. Thanks a lot.
>
>
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