> -----Original Message----- > From: abhay [mailto:abhayporwal@yahoo.com] > Sent: Sunday, January 26, 2003 7:34 PM > To: mems-talk@memsnet.org > Subject: [mems-talk] Polysilicon Etching > hi all, > We are looking for etching a 4000 A polysilicon > layer. We want the etching do be completed in less > then 2min as there after our photoresist tend to etch > away. So what solution shd we try and what proportion. > Thanks > Regards > Abhay Porwal Use an HF-nitric solution. A good one is 126 HNO3 : 60 H2O : 5 NH4F. Let it sit for > 8 hours after mixing! In my measurements (yours will probably be a little different), undoped poly etched at 1000 A/min and doped poly etched at 3100 A/min. Two types of positive photoresist did not etch. --Kirt Williams Agilent Technologies