durusmail: mems-talk: Bubbles in my SU-8
Bubbles in my SU-8
2003-03-14
2003-03-18
heat effect on MUMPS cantilever beam
2003-04-04
Bubbles in my SU-8
frank berisford
2003-03-14
Hello all,

I've been trying several different techniques in an attempt to minimize bubbles
in my SU-8.  At first I tried pippeting it onto my substrate using a large bore
pippette.  I also tried dispensing from a syringe and pouring straight from
the bottle.  The pouring seems to work best but I still get a sizable bubble
count.  From here I've tried sucking the bubbles out with a needle and syringe
but to no avail.

I've read of others wiping the SU-8 across the wafers but have yet to try this
method for fear of destroying the substrate.  For what it's worth I'm using
SU-8 2035 with a target thickness of 50microns but I think I've got my spin
recipe locked down.

Thanks for  your time,
Frank Berisford




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