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mems-talk
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Align and bond wafers without optical aligner ("유충호")
Gold bonding problem (Chiatti O)
5" photomask (HBTUSA@aol.com)
Using PMMA in HF-etching with HF / Slow Au etching (Sampo Tuukkanen)
Gold bonding problem (Bill Moffat)
Using PMMA in HF-etching with HF / Slow Au etchin g (kirt_williams@agilent.com)
5" photomask (David Nemeth)
Using PMMA in HF-etching with HF / Slow Au etching (Mighty Platypus)
green gold (Madanagopal K.V.)
etching Si-N, but not Al2O3 (Honggang Jiang)
Ohmic contact to AlGaAs (Lihua Li)