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mems-talk
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wet etch of LPCVD amorphous Silicon (Kvel Bergtatt)
Isotropic / anisotropic polymer etch (Hakemi, Ghazal)
Prooerties of AZ9200 thick photoresist (DEBASHIS MAJI)
Isotropic / anisotropic polymer etch (Edward Sebesta)
wet etch of LPCVD amorphous Silicon (Roger Shile)
Edge Bead Removal (Brubaker Chad)
Isotropic / anisotropic polymer etch (Michael D Martin)