durusmail
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mems-talk
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Query on materials used in the manufacture of mems (Kristin Bautista)
thick S1813 (Fei Wang)
DRIE Etch lag due to microloading (Fei Wang)
Query on materials used in the manufacture of mems (Kirt Williams)
DRIE Etch lag due to microloading (Prasanna Srinivasan)
mems based pressure sensor (Albert Henning)