durusmail: mems-talk: Adhesion promotors for TiN
Adhesion promotors for TiN
2003-07-01
2003-07-01
Ti Etch
2003-07-01
2003-07-02
2003-07-06
Adhesion promotors for TiN
Knut Lian
2003-07-01
Dear MEMS collegues,

Does anybody know a suitable adhesion promotor for improving the adhesion of
Shipley 1800 series resist on TiN?

Best regards

Knut Lian
Process Development Engineer
SensoNor asa
www.sensonor.com



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