Dear Knut, We have made good experiences so far with the TI Prime (beta) adhesion promoter from MicroChemicals, D-89077 Ulm, Germany, www.microchemicals.com . We have used the following process: 1. Substrate preparation: After cleaning the substrate with acetone and subsequently isopropylen, put the substrate on the hotplate at a minimum temperature of 120°C for 10 minutes to remove adsorbed water from the substrates surface. 2. Spin coat the TI Prime at approx. 2000-4000 U/min. for approx. 20 seconds. After spin-coating, no residual drops or film of TI Prime should be visible. 3. Bake the substrate at 120°C for 2 minutes on the hotplate. 4. Proceed with spin-coating the resist immediately!! (TI Prime contains Titanium. For CMOS processes RCA-cleaning is recommended after lithography before applying high temperatures). I hope this helps a little bit. Regards, Robert -----Original Message----- From: Knut Lian [mailto:knut.lian@sensonor.no] Sent: Dienstag, 01. Juli 2003 08:08 To: MEMS (E-mail) Subject: [mems-talk] Adhesion promotors for TiN Dear MEMS collegues, Does anybody know a suitable adhesion promotor for improving the adhesion of Shipley 1800 series resist on TiN? Best regards Knut Lian Process Development Engineer SensoNor asa www.sensonor.com