durusmail: mems-talk: Protect backside of Si wafer from TMAH
Protect backside of Si wafer from TMAH
2003-07-07
Re: AW: [mems-talk] Protect backside of Si wafer from TMAH
2003-07-08
Protection of backside of chips in TMAH
2003-07-10
2003-07-11
2003-07-07
2003-07-07
Protect backside of Si wafer from TMAH
Pimpin Alongkorn
2003-07-06
Dear Folk,

I would like to purchase a wafer holder for wet etching that can protect a
backside of wafer from etchant solution such as HF, TMAH and KOH. Could you
recommend me a Japan company (or other countries are O.K.)? It will be
invaluable help for me. Thank you very much.

Alongkorn Pimpin
THT laboratory

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