Hello, You can try contacting Furukawa Electric in Tokyo, Japan. I believe they have a UV tape that is used to protect the front side of a patterned wafer during an etching process. I believe this is their phone number, 3-3286-3213 Thank you, Mario Robles Tanaka Systems, Inc. 2577 Leghorn Street Mountain View, CA 94043 650-966-8001 ofc 650-966-1881 fax www.dicingblades.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Pimpin Alongkorn Sent: Saturday, July 05, 2003 10:31 PM To: mems-talk@memsnet.org Subject: [mems-talk] Protect backside of Si wafer from TMAH Dear Folk, I would like to purchase a wafer holder for wet etching that can protect a backside of wafer from etchant solution such as HF, TMAH and KOH. Could you recommend me a Japan company (or other countries are O.K.)? It will be invaluable help for me. Thank you very much. Alongkorn Pimpin THT laboratory _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/