durusmail: mems-talk: Protect backside of Si wafer from TMAH
Protect backside of Si wafer from TMAH
2003-07-07
Re: AW: [mems-talk] Protect backside of Si wafer from TMAH
2003-07-08
Protection of backside of chips in TMAH
2003-07-10
2003-07-11
2003-07-07
2003-07-07
Protect backside of Si wafer from TMAH
Bill Flounders
2003-07-07
Take a look at:
http://www.ammt.de/html/wafer_holders.html

Bill Flounders, Ph.D.
Technology Manager
Berkeley Microlab


Pimpin Alongkorn wrote:
> Dear Folk,
>
> I would like to purchase a wafer holder for wet etching that can protect
> a backside of wafer from etchant solution such as HF, TMAH and KOH.
> Could you recommend me a Japan company (or other countries are O.K.)? It
> will be invaluable help for me. Thank you very much.
>
> Alongkorn Pimpin
> THT laboratory
>
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