You need an adhesion layer. Use ~250 angstroms of Cr, Ti, or Ta. -Mike >>> sriramb@blr.bel.co.in 07/26/03 02:42AM >>> Dear All, I tried to plate Gold over a Platinum thin film (3000 Angstrom) on SiO2. Before the plating, we go through a degreasing step, wherein we boil the Silicon wafers in Tri Chloro Ethylene, followed by a dilute HCl dip. The Pt film is deposited by DC sputtering. The trouble is that the Pt film peels off when the HCl dip is done. What should I do to overcome this problem? Thanks in advance. Thanking You, With Best Regards, Sriram Senior Process Engineer, BEL Bangalore INDIA _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/