durusmail: mems-talk: BCB as pretectd layer
BCB as pretectd layer
2003-09-21
BCB as pretectd layer
Mohamed Saadoui
2003-09-21
Hi,


I want to use CYCLOTENE resine BCB-4000 as protective coating during silicon
etching in pottasium hydroxide KOH at 85C, which must be removed at the end of
processing.

It will be very helpful if anyone can give information about this BCB process.

Thanks and Regards,

Mohamed SAADAOUI
Laboratoire d' Analyse
et d' Architectures Systemes
LAAS- TOULOUSE. france




reply