Hi, Cyclotene website (www.cylcotene.com) has some good information regarding curing as well as etching BCB. We followed their suggested procedure and have reasonable success. bala Balaji Lakshminarayanan, Research Assistant Microwave and Wireless Group Electrical Engineering Department University of South Florida 4202 E. Fowler Avenue ENB 118 Tampa, FL 33620 Phone: (813)974-3939 FAX: (813)974-5250 email: lakshmin@eng.usf.edu http://www.eng.usf.edu/~lakshmin On Sun, 21 Sep 2003, Mohamed Saadoui wrote: > Hi, > > > I want to use CYCLOTENE resine BCB-4000 as protective coating during silicon > etching in pottasium hydroxide KOH at 85C, which must be removed at the end of > processing. > > It will be very helpful if anyone can give information about this BCB process. > > Thanks and Regards, > > Mohamed SAADAOUI > Laboratoire d' Analyse > et d' Architectures Systemes > LAAS- TOULOUSE. france > > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ >