durusmail: mems-talk: How to separate a silicon chip from a pyrex glas
How to separate a silicon chip from a pyrex glas
How to separate a silicon chip from a pyrex glas
Schlienger, Joel P.
2003-10-17
Does anybody has the experience on how to separate a pressure silicon chip from
the pyrex support glas. I have a chip that is mounted by anodic bonding on the
pyrex but need to remove it in order to use the pressor sensor in gauge
conditions.

Thanks for any comments on that.

Joel

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