Dear Graham, Thanks a lot for your mail and help. I already noticed, that it is very difficult to get gauge pressure chips from companies in general (without pyrex glas). So I will try the first approach as recommended in your mail. Best, Joel >Joel >You may be able to dice off the pyrex using a diamond saw or perhaps >drilling a hole using ultrasonic milling or >sanblasting with a fine nozzle. >Either way you have to be careful not to damage the sensor chip. >Alternatively find someone who will give you a a gage prssure chip, >try silicon micro structures in milpitas California >Graham > >-----Original Message----- >From: Schlienger, Joel P. [mailto:schlienger@lsm.iet.mavt.ethz.ch] >Sent: Friday, October 17, 2003 2:45 PM >To: mems-talk@memsnet.org >Subject: [mems-talk] How to separate a silicon chip from a pyrex glas > > >Does anybody has the experience on how to separate a pressure >silicon chip from the pyrex support glas. I have a chip >that is mounted by anodic bonding on the pyrex but need to remove it >in order to use the pressor sensor in gauge >conditions. > >Thanks for any comments on that. > >Joel > >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ > >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ -- ---------------------------------------------------------- Joel Schlienger, Research Scientist Turbomachinery Laboratory ETH Zurich Sonneggstrasse 3, CH-8092 Zurich Tel.: +41-1-632 63 43, Fax: +41-1-632 11 00 E-Mail: mailto:schlienger@lsm.iet.mavt.ethz.ch ---------------------------------------------------------