Joel
You may be able to dice off the pyrex using a diamond saw or perhaps drilling a
hole using ultrasonic milling or
sanblasting with a fine nozzle.
Either way you have to be careful not to damage the sensor chip.
Alternatively find someone who will give you a a gage prssure chip, try silicon
micro structures in milpitas California
Graham

-----Original Message-----
From: Schlienger, Joel P. [mailto:schlienger@lsm.iet.mavt.ethz.ch]
Sent: Friday, October 17, 2003 2:45 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] How to separate a silicon chip from a pyrex glas


Does anybody has the experience on how to separate a pressure silicon chip from
the pyrex support glas. I have a chip
that is mounted by anodic bonding on the pyrex but need to remove it in order to
use the pressor sensor in gauge
conditions.

Thanks for any comments on that.

Joel

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