durusmail: mems-talk: thin film TiO2 etchant
thin film TiO2 etchant
2003-10-22
2003-10-24
2003-10-27
thin film TiO2 etchant
ravneet singh
2003-10-22
hello friends,
can anybody tell me how i can etch a thin film of
tio2(100 angstrom).
please, tell me easiest and econimical echant, like
some chemical etchant.

thanks

=====
Ravneet Singh,
Research Scholar,
Microelectonics Lab
Electrical Engineering Dept.,
IIT Madras, Chennai - 600 036.

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