durusmail: mems-talk: thin film TiO2 etchant
thin film TiO2 etchant
2003-10-22
2003-10-24
2003-10-27
thin film TiO2 etchant
kris
2003-10-24
try 1: 50    NH4OH:H2O2

Kris


--- ravneet singh  wrote:
> hello friends,
> can anybody tell me how i can etch a thin film of
> tio2(100 angstrom).
> please, tell me easiest and econimical echant, like
> some chemical etchant.
>
> thanks
>
> =====
> Ravneet Singh,
> Research Scholar,
> Microelectonics Lab
> Electrical Engineering Dept.,
> IIT Madras, Chennai - 600 036.
>
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