Does this selectively etch TiO2 films grown on substrates like Silicon and SrTiO3 or does it etch them too? greetings, Rajesh ----- Original Message ----- From: "kris"To: "General MEMS discussion" Sent: Friday, October 24, 2003 5:38 PM Subject: Re: [mems-talk] thin film TiO2 etchant > try 1: 50 NH4OH:H2O2 > >>