durusmail: mems-talk: Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
martinmi@engin.umich.edu
2003-11-11
I need to send out 100 mm wafers for either a rapid thermal anneal @ 1100 C in
N2 for 10 minutes, or a longer anneal @ 800 C.   I have been having trouble
finding a vendor whose equipment is running, and who will accept the wafers
after they have been exposed to metal.  Does anybody know of any commercial
services out there ?

Michael

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