durusmail: mems-talk: Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
Bill Flounders
2003-11-12
UC Berkeley Microlab can provide this service.
You may contact me directly.
Bill Flounders
Microlab Technology Manager
510-643-6779
bill@eecs.berkeley.edu

martinmi@engin.umich.edu wrote:
> I need to send out 100 mm wafers for either a rapid thermal anneal @ 1100 C in
> N2 for 10 minutes, or a longer anneal @ 800 C.   I have been having trouble
> finding a vendor whose equipment is running, and who will accept the wafers
> after they have been exposed to metal.  Does anybody know of any commercial
> services out there ?
>
> Michael
>
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