durusmail: mems-talk: Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
Services for Rapid Thermal Anneal
Dunham, Glen
2003-11-12
I can do it.
Glen Dunham
Pacific Northwest National Lab
509 376 4397


-----Original Message-----
From: martinmi@engin.umich.edu [mailto:martinmi@engin.umich.edu]
Sent: Tuesday, November 11, 2003 9:08 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Services for Rapid Thermal Anneal



I need to send out 100 mm wafers for either a rapid thermal anneal @ 1100 C in
N2 for 10 minutes, or a longer anneal @ 800 C.   I have been having trouble
finding a vendor whose equipment is running, and who will accept the wafers
after they have been exposed to metal.  Does anybody know of any commercial
services out there ?

Michael

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