durusmail: mems-talk: RIE - keep Temp constant
RIE - keep Temp constant
2004-11-30
2004-11-30
2004-11-30
2004-12-01
Can vaccum grease be used to bond PDMS to Silica
2004-12-01
RIE - keep Temp constant
Tripp, Marie Kathleen
2004-11-30
Hi Karin,

We use vacuum grease.  However Trichloroethylene is needed to remove it
afterwards.  Not the nicest of solvents...

-Marie



reply