durusmail: mems-talk: RIE - keep Temp constant
RIE - keep Temp constant
2004-11-30
2004-11-30
2004-11-30
2004-12-01
Can vaccum grease be used to bond PDMS to Silica
2004-12-01
RIE - keep Temp constant
BobHendu@aol.com
2004-11-30
Fomblin oil does work for us when we are using pieces. Just make sure you don't
use too much. A small drop is usually sufficient for making good thermal contact
to the carrier wafer. Now here is the secret to removing Fomblin completely. Use
Simple Green. It is the only thing I have found that will do the trick. Good
luck Bob Henderson

reply