To provide thermal contact between a substrate and the electrode in an RIE system, I've used Fomblin grease. After etch I removed the grease with Fomblin solvent. Roger Shile -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Karin Buchholz Sent: Monday, November 29, 2004 11:44 PM To: mems-talk@memsnet.org Subject: [mems-talk] RIE - keep Temp constant Dear mems talkers, we have a RIE chamber with temperature control of the 3" carrier wafer. Since we are just using waferpieces we just place these on top of the carrier wafer. It seems now that these small pieces do not have proper thermal contact to the chuck, so the temperature of the sample is not constant from etch to etch and the etch rate also varies by 50per cent... Do you have any suggestions how to provide good thermal contact? The manufacturer suggested Fomblin vaccuum oil, but it is impossible to remove it from the samples after etching... I appreciate any help! Have a nice day, Karin -- Dipl.-Ing. Karin Buchholz Walter Schottky Institut Technische Universitaet Muenchen _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/