durusmail: mems-talk: How to take a cross section SEM pictures?
metal oxidation at 200C
2005-05-19
2005-05-19
How to take a cross section SEM pictures?
2005-05-30
2005-06-01
How to take a cross section SEM pictures?
csh@u.washington.edu
2005-05-24
Hello,

I have a grating sample on AZ 1512 with Si <100> as substrate.
The period is supposed to be about 0.24um.
I am wondering how to take SEM of the cross section of the grating?
Thanks,

chengsheng huang
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