Hi, If you have large areas of SU-8 a thermal shock - heat the wafer and cool in water - might do it. Otherwise think about a SU-8 which has a bad adhesion to your substrate (e.g. HMDS priming prior to spinning or sacrificial photoresist). As already mentioned, etching SU-8 will be difficult. Regards Michael Zickar -------------------------------------------- Institute of Microtechnology University of Neuchatel Switzerland -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of J.J wang Sent: Montag, 24. Juli 2006 20:31 To: General MEMS discussion Subject: Re: [mems-talk] SU 8 removal Hi Jeff. The OmniCoat will help removal of the SU-8. You can try to apply it before SU-8. Good luck J.J. Wang Jeff chenwrote: Hi, all, Does anyone have some experience to completely remove SU8 after development? I tried PG Remover and it didn't work well. And also plasma cleaning under oxygen, still not working.